Prof. Wei Yan Profile

Prof. Wei Yan

at Chinese Academy of Sciences

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Author

Publications (10)

Proceedings Article | 6 February 2019 Paper

Double-beam laser interference lithography based on optical field modulation

Fuping Peng, Wei Yan, Fan Yang, Fanxing Li

Proceedings Volume 10842, 108421C (2019) https://doi.org/10.1117/12.2510947

KEYWORDS: Modulation, Lithography, Phase shift keying, Optics manufacturing, Laser applications, Wavefronts, Etching, Electron beam lithography, Laser development, Polarization

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Proceedings Article | 30 January 2019 Paper

Dynamic three-dimensional shape measurement based on light field imaging

Fan Yang, Wei Yan, Peng Tian, Fanxing Li, Fuping Peng

Proceedings Volume 10841, 108410D (2019) https://doi.org/10.1117/12.2510920

KEYWORDS: 3D image processing, 3D metrology, Image processing, Optical testing, Imaging systems, Sensors, Cameras, 3D acquisition, Digital image processing, Calibration

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Proceedings Article | 30 January 2019 Paper

Lensless in-line holographic microscope resolution enhancement method from two intensity measurements based on data interpolation

Fanxing Li, Peng Tian, Wei Yan, Fan Yang, Fuping Peng

Proceedings Volume 10841, 108410F (2019) https://doi.org/10.1117/12.2512106

KEYWORDS: Holograms, Image resolution, Resolution enhancement technologies, Digital holography, Holography, Phase retrieval, 3D image reconstruction, Absorption, Reconstruction algorithms, Image enhancement

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SPIE Journal Paper | 28 December 2016

Designing continuous-phase super-resolving filters by differential evolution and conjugate gradient method

Hongtao Gao, Song Hu, Yudong Zhang, Wei Yan

OE, Vol. 55, Issue 12, 125108, (December 2016) https://doi.org/10.1117/12.10.1117/1.OE.55.12.125108

KEYWORDS: Point spread functions, Optical filters, Phase only filters, Zernike polynomials, Solids, Super resolution, Confocal microscopy, Optical engineering, Image filtering, Optimization (mathematics)

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Proceedings Article | 25 October 2016 Paper

Positioning control system of three-dimensional wafer stage of lithography

Peng Tian, Wei Yan, Fan Yang, Fanxing Li, Song Hu

Proceedings Volume 9685, 96850T (2016) https://doi.org/10.1117/12.2244874

KEYWORDS: Lithography, Control systems, Semiconducting wafers, Clocks, Photomasks, Process control, Stepper motor drivers, Data communications, Telecommunications, Camera shutters

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Proceedings Article | 23 August 2013 Paper

An algorithm for restoring the wafer surface based on B-spline surface reconstruction

Nan Wang, Wei Jiang, Wei Yan, Song Hu

Proceedings Volume 8911, 89110G (2013) https://doi.org/10.1117/12.2034199

KEYWORDS: Semiconducting wafers, Lithography, Reconstruction algorithms, Wafer-level optics, Silicon, Fuzzy logic, Integrated circuits, Optics manufacturing, Sensors, Clouds

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Proceedings Article | 23 August 2013 Paper

A research of a high precision multichannel data acquisition system

Ling-na Zhong, Xiao-ping Tang, Wei Yan

Proceedings Volume 8911, 89110I (2013) https://doi.org/10.1117/12.2034355

KEYWORDS: Data acquisition, Analog electronics, Data conversion, Lithography, Signal processing, Power supplies, Data storage, Data processing, Error analysis, Digital signal processing

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Proceedings Article | 15 October 2012 Paper

Research on Micro-Displacement Driving Technology Based on Piezoelectric Ceramic

Bo Hu, Xiaoping Tang, Song Hu, Wei Yan, Zhicheng Hu

Proceedings Volume 8418, 84180Z (2012) https://doi.org/10.1117/12.973648

KEYWORDS: Ceramics, Control systems, Actuators, Optical amplifiers, Mathematical modeling, Optics manufacturing, Adaptive control, Power supplies, Amplifiers, Switches

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Proceedings Article | 15 October 2012 Paper

Technology of focus detection for 193nm projection lithographic tool

Chengliang Di, Wei Yan, Song Hu, Feng Xu, Jinglong Li

Proceedings Volume 8418, 84180Y (2012) https://doi.org/10.1117/12.971448

KEYWORDS: Modulation, Semiconducting wafers, Image processing, Image filtering, Photoelasticity, Signal detection, Lithography, Polarization, Wafer-level optics, Projection lithography

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Proceedings Article | 21 November 2007 Paper

Nanolithography in evanescent near field by using nano-filmed noble metal layers

Yong Yang, Song Hu, Hanmin Yao, Guanxiao Cheng, Wei Yan

Proceedings Volume 6724, 67241A (2007) https://doi.org/10.1117/12.782841

KEYWORDS: Silver, Photoresist materials, Photomasks, Nanolithography, Metals, Refractive index, Near field, Near field optics, Optical lithography, Lithography

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Showing 5 of 10 publications

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