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Wenkai Pan
at Columbia Univ
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Publications (1)
Proceedings Article | 4 March 2022 Presentation + Paper
Thermal annealing of thin films using fiber lasers via the spot-beam annealing method
Ruobing Song, Bonan Shen, Nikita Lisenko, Jayoung Park, Wenkai Pan, Joshua Schoenly, Manuel Leonardo, Roger Dowd, James Im
Proceedings Volume 11988, 1198809 (2022) https://doi.org/10.1117/12.2611967
KEYWORDS: Annealing, Thin films, Fiber lasers, Silicon, Crystals, Thermal analysis, Temperature metrology, Thin film manufacturing, Solids, Laser development
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