Mr. Bill Maryniak Profile

Bill Maryniak

at New Scale Technologies Inc

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Publications (2)

Proceedings Article | 5 April 2007 Paper

Non-contacting electrostatic voltmeter for wafer potential monitoring

Maciej Noras, William Maryniak

Proceedings Volume 6518, 651843 (2007) https://doi.org/10.1117/12.707614

KEYWORDS: Sensors, Semiconducting wafers, Semiconductors, Spatial resolution, 3D vision, Silicon, Distance measurement, Metrology, Contamination, Electromechanical design

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Proceedings Article | 27 March 2006 Paper

Use of a piezo-driven cantilever beam as a sensor for electrostatic voltmeter

Jerzy Kieres, Maciej Noras, William Maryniak

Proceedings Volume 6166, 616611 (2006) https://doi.org/10.1117/12.657969

KEYWORDS: Sensors, Actuators, Capacitance, Capacitors, Systems modeling, Laser beam diagnostics, Manufacturing, Copper, Feedback loops, Electrodes

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