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William Reinhardt
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Publications (1)
Proceedings Article | 18 September 2018 Presentation + Paper
Magnetostrictively deforming the surface of a silicon wafer at two locations
M. Ulmer, R. Coppejans, M. Khreishi, K. Keely, D. Buchholz, R. Shiri, L. Rodriguez, A. O'Donnell, Z. Schonfeld, W. Reinhardt, L. Borgsmiller, T. Baturalp, V. Coverstone, J. Cao
Proceedings Volume 10761, 107610B (2018) https://doi.org/10.1117/12.2322511
KEYWORDS: Magnetism, Mirrors, Silicon, Actuators, X-ray optics, Sputter deposition, Semiconducting wafers, Head, Roads, X-ray telescopes
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