Dr. Xijin Zhao
at Tsinghua Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12954, 129541C (2024) https://doi.org/10.1117/12.3010111
KEYWORDS: Optical proximity correction

Proceedings Article | 21 November 2023 Poster + Paper
Proceedings Volume 12751, 1275114 (2023) https://doi.org/10.1117/12.2686135
KEYWORDS: Scanning electron microscopy, Contour extraction, Image segmentation, Lithography, Deep learning

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