Yanzhe Fu
at National Institute of Metrology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 18 December 2019 Paper
Yanzhe Fu, Xiang Ding, Jiangchao Li, Jiyan Zhang
Proceedings Volume 11337, 113370B (2019) https://doi.org/10.1117/12.2542145
KEYWORDS: Raman spectroscopy, Silicon, Confocal microscopy, Microscopes, Spatial resolution, Polymethylmethacrylate, Point spread functions, Chromium, Coating, Polishing

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