Dr. Yi-Hsin Chang
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 April 2024 Poster + Paper
Tsung-Ta (Alex) Wu, Jill Freeman, Abdalmohsen Elmalk, Li Yun Chang, Tsung Hsien Liu, Yi-Hsin Chang, Max Hsieh
Proceedings Volume 12955, 129552V (2024) https://doi.org/10.1117/12.3010501
KEYWORDS: Metrology, Stochastic processes, Modeling, Critical dimension metrology, Extreme ultraviolet lithography, Semiconducting wafers, Scanning electron microscopy, Data modeling, Matrices, Lithography

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