CONFERENCE PROCEEDINGS
Advanced Search
Yimin Huang
at Shanghai Institute of Technical Physics CAS
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 3 March 2008 Paper
Inductively coupled plasma etching of AlGaN using Cl2/Ar/BCl3 gases
Liang Chen, Yimin Huang, Jun Chen, Yan Sun, Tianxin Li, De-gang Zhao, Haimei Gong
Proceedings Volume 6621, 66211A (2008) https://doi.org/10.1117/12.790829
KEYWORDS: Etching, Aluminum, Gallium, Chlorine, Plasma etching, Gases, Crystals, Plasma, Argon, Scanning electron microscopy
Proceedings Article | 3 March 2008 Paper
Recombination lifetime characterization and mapping of p-i-n InP/Ln0.53Ga0.47As/InP mesa structure using the microwave photoconductivity decay (u-PCD) technique
Proceedings Volume 6621, 66211C (2008) https://doi.org/10.1117/12.790832
KEYWORDS: Ions, Microwave radiation, Gallium, Etching, Semiconducting wafers, Heterojunctions, Argon, Semiconductors, Fabrication, Infrared detectors
Proceedings Article | 15 October 2005 Paper
A demo imaging system based on GaN UV detectors
Yimin Huang, Xiangyang Li, Haimei Gong
Proceedings Volume 5964, 596414 (2005) https://doi.org/10.1117/12.624747
KEYWORDS: Sensors, Imaging systems, Gallium nitride, Ultraviolet detectors, Ultraviolet radiation, Lenses, Photodiodes, Signal to noise ratio, Readout integrated circuits, Light
Proceedings Article | 10 January 2005 Paper
A feasible thermal-cycle screening system for cryogenic semiconductor components
Proceedings Volume 5640, (2005) https://doi.org/10.1117/12.572718
KEYWORDS: Infrared detectors, Semiconductors, Sensors, Liquids, Nitrogen, Cryogenics, Indium, Mercury cadmium telluride, Long wavelength infrared, Infrared sensors
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top