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Yingchun Wu
at Westlake Univ
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Publications (1)
Proceedings Article | 28 November 2023 Paper
Nonvolatile electrically reconfigurable silicon photonics enabled by back-end-of-line integration of phase change materials
Junying Li, Maoliang Wei, Kai Xu, Bo Tang, Yiting Yun, Peng Zhang, Yingchun Wu, Kangjian Bao, Kunhao Lei, Zequn Chen, Hui Ma, Chunlei Sun, Ruonan Liu, Ming Li, Lan Li, Hongtao Lin
Proceedings Volume 12764, 127640D (2023) https://doi.org/10.1117/12.2687022
KEYWORDS: Silicon photonics, Waveguides, Photonics, Fabrication, Back end of line, Silicon, Antimony, Switching, Switches, Photonic devices, Chalcogenides
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