Dr. Yosuke Honda
at High Energy Accelerator Research Organization KEK
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 26 August 2024 Paper
Norio Nakamura, Ryukou Kato, Hiroshi Sakai, Kimichika Tsuchiya, Yoshinori Tanimoto, Yosuke Honda, Miho Shimada, Masahiro Yamamoto, Takanori Tanikawa, Olga Tanaka, Takashi Obina, Shinichiro Michizono, Hiroshi Kawata
Proceedings Volume 13177, 131770L (2024) https://doi.org/10.1117/12.3033966
KEYWORDS: Free electron lasers, Light sources, Lithography, Extreme ultraviolet, Extreme ultraviolet lithography, Power consumption, Polarization, Polarization control, Scanners, Tin

Proceedings Article | 13 June 2022 Poster + Presentation
Proceedings Volume PC12051, PC120510S (2022) https://doi.org/10.1117/12.2613617
KEYWORDS: Lithography, Free electron lasers, Extreme ultraviolet, Stochastic processes, Physics, Optical resonators, Machine learning, Light sources, Laser development, Infrared radiation

Proceedings Article | 30 September 2021 Presentation
Proceedings Volume 11854, 118540M (2021) https://doi.org/10.1117/12.2600782
KEYWORDS: Free electron lasers, Lithography, Light sources, Extreme ultraviolet, Optical simulations, Laser development, Extreme ultraviolet lithography, Continuous wave operation, Stochastic processes, Scanners

Proceedings Article | 20 September 2020 Presentation
Proceedings Volume 11517, 115170R (2020) https://doi.org/10.1117/12.2573121
KEYWORDS: Light sources, Free electron lasers, Extreme ultraviolet lithography, Mid-IR, Photomask technology, Extreme ultraviolet, Stochastic processes, Electron beams, Mirrors, Magnetism

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