This study presents a TFT structure which has less photo process and higher cost competitiveness in AMOLED display markets. A novel LTPS based 6 masks TFT structure for bottom emission AMOLED display is demonstrated in this paper. High field effect mobility (PMOS < 80 cm2/Vs ) and high reliability (PBTS △Vth< 0.02V @ 50oC VG=15V 10ks) was accomplished without the high temperature and rapid thermal annealing (RTA) activation process. Furthermore, a 14-inch AMOLED TV was achieved on the proposed 6-pep TFT backplane using the Gen. 3.5 mass production factory.
AMOLED(active matrix OLED) is known as the next generation display technology due to its better display quality, thin
form factor, lower power consumption, etc. With increasing demand of environment-friendly technology, OLED had
become a green solution for display. Additionally, due to its simple device structure, extra function could be easily
integrated. In this paper, in-cell touch AMOLED is also described briefly.
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