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Dr. Yu Wang
Advanced Scientist at Pilkington North America Inc
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Publications (1)
Proceedings Article | 30 August 2006 Paper
In situ infrared absorption spectroscopy for thin film growth by atomic layer deposition
Yu Wang, Min Dai, Sandrine Rivillon, Ming-Tsung Ho, Yves Chabal
Proceedings Volume 6325, 63250G (2006) https://doi.org/10.1117/12.681331
KEYWORDS: Silicon, Hybrid fiber optics, Atomic layer deposition, Oxides, Aluminum, Infrared spectroscopy, Interfaces, Dielectrics, Oxygen, Infrared radiation
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