Prof. YueQing Ding Profile

Prof. YueQing Ding

at Chongqing Institute of Metrology and Quality Inspection

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Publications (2)

Proceedings Article | 4 April 2023 Paper

Research on measurement method of submicron linewidth based on microscopic vision

Chong Yue, YueQing Ding, Lei Tao, Xin Chen, Jin Zhou

Proceedings Volume 12617, 1261770 (2023) https://doi.org/10.1117/12.2666760

KEYWORDS: Image processing, Digital filtering, Technology, Nonlinear filtering, Image filtering, Hough transforms, Calibration, Computing systems, Standards development, Imaging systems

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Proceedings Article | 4 April 2023 Paper

Measurement of optical constants of nano-film based on ellipsometric data at visible wavelength

Chong Yue, YueQing Ding, Lei Tao, Jin Zhou, Xin Chen

Proceedings Volume 12617, 126176Y (2023) https://doi.org/10.1117/12.2666758

KEYWORDS: Particle swarm optimization, Ellipsometry, Refractive index, Particles, Thin films, Evolutionary algorithms, Thin film devices, Optical testing, Mathematical optimization, Reflection

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