Yutaro Sato
at Nippon Control System Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 21 November 2023 Presentation + Paper
Soeun Shin, Boram Lee, Sukho Lee, Eok bong Kim, Mina Kim, Jin Choi, Sanghee Lee, Yutaro Sato, Ahmad Syukri, Itaru Ono, Yohei Torigoe
Proceedings Volume 12751, 127510V (2023) https://doi.org/10.1117/12.2687866
KEYWORDS: Extreme ultraviolet, Critical dimension metrology, Scattering, Modeling, Mathematical optimization, Algorithm development, Point spread functions, Lithography, Backscatter, Semiconductors

Proceedings Article | 3 October 2018 Paper
Proceedings Volume 10810, 108101H (2018) https://doi.org/10.1117/12.2502068
KEYWORDS: Photomasks, Extreme ultraviolet, Etching, Calibration, Extreme ultraviolet lithography, Critical dimension metrology, Mask making

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