CONFERENCE PROCEEDINGS
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Zuanyi Li
at ASML
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Author
Publications (2)
Proceedings Article | 28 April 2023 Presentation + Paper
Physical dose modeling and throughput optimization in EUV computational lithography
Austin Peng, Christopher Kaplan, Jeff Lu, Michael Crouse, Zuanyi Li, Xiaobo Xie, David Rio, Achim Woessner, Alexander Tan, Cuiping Zhang, Xiaoyang Li, Dezheng Sun, Stephen Hsu, Rafael Howell, Joerg Zimmermann
Proceedings Volume 12494, 124940C (2023) https://doi.org/10.1117/12.2657454
KEYWORDS: Source mask optimization, Computational lithography, Nanoimprint lithography, Extreme ultraviolet, Semiconducting wafers, Scanners, Modeling, Reticles, Artificial intelligence, Light sources and illumination
Proceedings Article | 26 February 2021 Presentation
Full chip computational lithography for KrF multi-focal imaging (MFI) (Conference Presentation)
Will Conley, Vince Vince Plachecki, Stephen Hsu, Michael Crouse, Rongkuo Zhao, John He, Pieter Scheijgrond, Dezheng Sun, Xiaoyang Li, Dongqing Zhang, Ming-Chun Tien, Jun Ye, Rafael Howell, Chen Liu, Xiaolong Zhang, Hai Li, Zuanyi Li, Xiaobo Xie, Jing Su, Yzzer Roman
Proceedings Volume 11613, 116130E (2021) https://doi.org/10.1117/12.2585651
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