Dr. Chang Aucki Choi Profile

Dr. Chang Aucki Choi

at ETRI

SPIE Involvement:

Author

Publications (16)

Proceedings Article | 9 January 2008 Paper

Sensing gap reconfigurable capacitive type MEMS accelerometer

Chang Han Je, Myunglae Lee, Sunghye Jung, Sungsik Lee, Gunn Hwang, Changauck Choi

Proceedings Volume 6800, 68001Z (2008) https://doi.org/10.1117/12.759392

KEYWORDS: Microelectromechanical systems, Electrodes, Actuators, Capacitance, Sensors, Deep reactive ion etching, Oxides, Resistance, Etching, Bulk micromachining

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Proceedings Article | 12 November 2005 Paper

Multiplexed polymer surface plasmon sensor with integrated optical coupler

Hyeon-Bong Pyo, Se Ho Park, Kwang Hyo Chung, Chang Auck Choi

Proceedings Volume 6007, 60070W (2005) https://doi.org/10.1117/12.630861

KEYWORDS: Sensors, Surface plasmons, Plasmons, Dielectrics, Multiplexing, Refractive index, Metals, Gold, Polymers, Prisms

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Proceedings Article | 28 September 2001 Paper

Fabrication of highly sensitive thermal microflow sensor with surface-micromachined vacuum platform for gas and liquid applications

Chi-Hoon Jun, Chang-Auck Choi, Won-Ick Jang, Youn Tae Kim

Proceedings Volume 4557, (2001) https://doi.org/10.1117/12.442973

KEYWORDS: Sensors, Silicon, Microfluidics, Liquids, CMOS sensors, Etching, Oxides, Surface micromachining, Thermoelectric materials, Oxidation

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Proceedings Article | 25 August 2000 Paper

Fabrication of surface-micromachined thermally driven micropump by anhydrous HF gas-phase etching with 2-propanol

Won-Ick Jang, Chang-Auck Choi, Myung-Lae Lee, Chi-Hoon Jun, Youn Tae Kim

Proceedings Volume 4174, (2000) https://doi.org/10.1117/12.396426

KEYWORDS: Etching, HF etching, Oxides, Silicon, Surface micromachining, Plasma enhanced chemical vapor deposition

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Proceedings Article | 25 August 2000 Paper

Silicon surface micromachining of a deep vacuum cavity structure and its application to a microflow sensor

Chi-Hoon Jun, Chang-Auck Choi, Won-Ick Jang, Youn Tae Kim

Proceedings Volume 4174, (2000) https://doi.org/10.1117/12.396427

KEYWORDS: Silicon, Sensors, Surface micromachining, Microelectromechanical systems, Oxides, Dielectrics, Magnetism, Annealing, CMOS sensors

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Proceedings Article | 25 August 2000 Paper

Formation of low-stress multilayered thick polysilicon films for fabrication of microsystems

Chang-Auck Choi, Won-Ick Jang, Myung-Lae Lee, Youn Tae Kim

Proceedings Volume 4174, (2000) https://doi.org/10.1117/12.396447

KEYWORDS: Doping, Multilayers, Microsystems, Annealing, Phosphorus, Heat treatments, Microelectromechanical systems, Low pressure chemical vapor deposition, Microresonators, Manufacturing

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Proceedings Article | 15 August 2000 Paper

Planar latch-up microactuator driven by thermoelastic force

Jong-Hyun Lee, Myung-Lae Lee, Won-Ick Jang, Chang-Auck Choi, Youn Tae Kim

Proceedings Volume 4176, (2000) https://doi.org/10.1117/12.395638

KEYWORDS: Microactuators, Actuators, Optical switching, Resistance, Micromirrors, Reliability, Optical fabrication, Oxides, Scanning electron microscopy, Prototyping

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Proceedings Article | 15 March 2000 Paper

Micromachined silicon actuators with low driving voltage and high accuracy for optical switches and tunable filters

Jong-Hyun Lee, Myung-Lae Lee, Won-Ick Jang, Chang-Auck Choi, Kwangjoon Kim

Proceedings Volume 3953, (2000) https://doi.org/10.1117/12.379605

KEYWORDS: Microactuators, Optical switching, Tunable filters, Actuators, Silicon, Mirrors, Oxides, Optical communications, Optical components, Reactive ion etching

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Proceedings Article | 1 October 1999 Paper

Dry release process of anhydrous HF gas-phase etching for the fabrication of a vibrating microgyroscope

Won-Ick Jang, Chang-Auck Choi, Yoonshik Hong, Chi-Hoon Jun, Youn Tae Kim, Jong-Hyun Lee

Proceedings Volume 3892, (1999) https://doi.org/10.1117/12.364477

KEYWORDS: Etching, Oxides, Gyroscopes, Silicon, HF etching, Semiconducting wafers, Low pressure chemical vapor deposition, Reactive ion etching, Electrodes, Anisotropic etching

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Proceedings Article | 29 September 1999 Paper

Surface-micromachined electrostatic diaphragm micropump

Won-Ick Jang, Yong Lee, Chang-Auck Choi, Chi-Hoon Jun, Youn Tae Kim

Proceedings Volume 3891, (1999) https://doi.org/10.1117/12.364469

KEYWORDS: Etching, Oxides, Microfluidics, Silicon, HF etching, Surface micromachining, Control systems, Low pressure chemical vapor deposition, Profilometers, Gases

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Proceedings Article | 31 August 1999 Paper

Bistable planar polysilicon microactuator with shallow arch-shaped leaf springs

Jong-Hyun Lee, Myung-Hyun Lee, Won-Ick Jang, Chang-Auck Choi, Jin Joo

Proceedings Volume 3876, (1999) https://doi.org/10.1117/12.360505

KEYWORDS: Microactuators, Oxides, Optical switching, Etching, Microrelays, Micromachining, HF etching, Finite element methods, Reliability, Silicon

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Proceedings Article | 10 March 1999 Paper

Bandwidth analysis of a microgyroscope vibrating in two orthogonal axes on the substrate plane

Yoonshik Hong, Jong-Hyun Lee, Chang Lee, Won-Ick Jang, Chang-Auck Choi, Soo Hyun Kim, Yoon Keun Kwak

Proceedings Volume 3680, (1999) https://doi.org/10.1117/12.341161

KEYWORDS: Gyroscopes, Electrodes, Performance modeling, Etching, Electromechanical design, Silicon, Oxides, Analytical research, Metals, Motion measurement

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Proceedings Article | 10 March 1999 Paper

Characteristics of residual products in HF gas-phase etching of sacrificial oxides for silicon micromachining

Won-Ick Jang, Chang-Auck Choi, Chang Lee, Yoonshik Hong, Jong-Hyun Lee

Proceedings Volume 3680, (1999) https://doi.org/10.1117/12.341163

KEYWORDS: Etching, Oxides, Silicon, Polysomnography, Scanning electron microscopy, HF etching, Micromachining, Interfaces, Semiconducting wafers, Photography

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Proceedings Article | 10 March 1999 Paper

Effect of polysilicon interface on stress in multistacked polysilicon films

Chang-Auck Choi, Chang Lee, Won-Ick Jang, Jong-Hyun Lee, Byung-Ki Shon

Proceedings Volume 3680, (1999) https://doi.org/10.1117/12.341186

KEYWORDS: Doping, Interfaces, Phosphorus, Bridges, Annealing, Low pressure chemical vapor deposition, Deposition processes, Heat treatments, Oxygen, Molecular bridges

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Proceedings Article | 31 August 1998 Paper

Silicon surface micromachining by anhydrous HF gas-phase etching with methanol

Won-Ick Jang, Chang-Auck Choi, Chang Lee, Yoonshik Hong, Jong-Hyun Lee, Jong Baek, Bo Woo Kim

Proceedings Volume 3511, (1998) https://doi.org/10.1117/12.324292

KEYWORDS: Etching, Oxides, Silicon, HF etching, Surface micromachining, Semiconducting wafers, Electrodes, Scanning electron microscopy, Wet etching, Photography

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Proceedings Article | 31 August 1998 Paper

Control and modeling of stress in multistacked polysilicon films considering oxidation effect

Chang Lee, Won-Ick Jang, Chang-Auck Choi, Yoonshik Hong, Jong-Hyun Lee, Kwangsoo No, Dang Wee

Proceedings Volume 3511, (1998) https://doi.org/10.1117/12.324316

KEYWORDS: Annealing, Phosphorus, Doping, Interfaces, Silicon, Chemical species, Low pressure chemical vapor deposition, Control systems, Semiconducting wafers, Oxidation

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Showing 5 of 16 publications

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