The precision of centroid location for infrared LED point images is an important factor, which affects the precision of the light-pen Coordinate Measuring Machining (CMM) .In this paper, the error model using the traditional center of mass (COM) algorithm is analyzed and it is shown that there are systematic error and random error. This paper analyzes the systematic error and random error, and then adopts the Gaussian surface fitting (GSF) algorithm and weighted centre-ofgravity (WCOG) algorithm to compensate systematic errors, meanwhile it analyzes how to reduce random error. The simulation results show that the accuracy of the infrared LED point position can be enhanced from 1/ 20 pixel to 1/100 pixel using the new algorithm.
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