A new long range tool servo-fast axis servo is developed, which is used for fabricating the non-rotational symmetric optics surface with millimeters’ sag. The mechanism design, motion modeling and development of FAS device were studied. The FAS consists of a linear motor, aerostatic bearings, high-resolution encoder and a motion controller. A control strategy consists of a proportional, integral and derivative (PID) feedback controller and velocity/acceleration feedforward controller is implemented to accommodate the system control performance. Experimental tests have been carried out to verify the performance of the FAS system.
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