Mr. Xiangyu Wei Profile

Xiangyu Wei

at Shanghai Institute of Optics & Fine Mechanics CAS

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Publications (1)

Proceedings Article | 27 March 2022 Paper

Theoretical analysis of retrace error in Fizeau interferometer for deformed optical flats

Xiangyu Wei, Rong Su, Feng Tang, Xiangzhao Wang

Proceedings Volume 12169, 12169AY (2022) https://doi.org/10.1117/12.2626352

KEYWORDS: Fizeau interferometers, Semiconducting wafers, Monochromatic aberrations, Error analysis, Silicon, Wafer-level optics, Zernike polynomials, Wavefronts, Ray tracing, Interferometers

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