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20 November 2017 Silicon pore optics for the international x-ray observatory
E. Wille, K. Wallace, M. Bavdaz, M. J. Collon, R. Günther, M. Ackermann, M. W. Beijersbergen, M. O. Riekerink, M. Blom, B. Lansdorp, L. de Vreede
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Proceedings Volume 10565, International Conference on Space Optics — ICSO 2010; 105652L (2017) https://doi.org/10.1117/12.2309240
Event: International Conference on Space Optics—ICSO 2010, 2010, Rhodes Island, Greece
Abstract
Lightweight X-ray Wolter optics with a high angular resolution will enable the next generation of X-ray telescopes in space. The International X-ray Observatory (IXO) requires a mirror assembly of 3 m2 effective area (at 1.5 keV) and an angular resolution of 5 arcsec. These specifications can only be achieved with a novel technology like Silicon Pore Optics, which is developed by ESA together with a consortium of European industry.

Silicon Pore Optics are made of commercial Si wafers using process technology adapted from the semiconductor industry. We present the manufacturing process ranging from single mirror plates towards complete focusing mirror modules mounted in flight configuration. The performance of the mirror modules is tested using X-ray pencil beams or full X-ray illumination. In 2009, an angular resolution of 9 arcsec was achieved, demonstrating the improvement of the technology compared to 17 arcsec in 2007. Further development activities of Silicon Pore Optics concentrate on ruggedizing the mounting system and performing environmental tests, integrating baffles into the mirror modules and assessing the mass production.
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E. Wille, K. Wallace, M. Bavdaz, M. J. Collon, R. Günther, M. Ackermann, M. W. Beijersbergen, M. O. Riekerink, M. Blom, B. Lansdorp, and L. de Vreede "Silicon pore optics for the international x-ray observatory", Proc. SPIE 10565, International Conference on Space Optics — ICSO 2010, 105652L (20 November 2017); https://doi.org/10.1117/12.2309240
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KEYWORDS
Mirrors
X-rays
Silicon
Optics manufacturing
Wafer-level optics
X-ray optics
Manufacturing
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