High-NA EUV lithography exposure tool: key advantages and program progress

Jan Van Schoot; Sjoerd Lok; Eelco Van Setten; Ruben Maas; Kars Troost; Rudy Peeters; Jo Finders; Judon Stoeldraijer; Jos Benschop; Paul Graeupner; Peter Kuerz; Winfried Kaiser; Thomas Stammler

doi:10.1117/12.2583640

22 February 2021 High-NA EUV lithography exposure tool: key advantages and program progress

Jan Van Schoot, Sjoerd Lok, Eelco Van Setten, Ruben Maas, Kars Troost, Rudy Peeters, Jo Finders, Judon Stoeldraijer, Jos Benschop, Paul Graeupner, Peter Kuerz, Winfried Kaiser, Thomas Stammler

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Proceedings Volume 11609, Extreme Ultraviolet (EUV) Lithography XII; 1160905 (2021) https://doi.org/10.1117/12.2583640
Event: SPIE Advanced Lithography, 2021, Online Only

Abstract

While EUV systems equipped with a 0.33 Numerical Aperture (NA) lens are being applied in high volume manufacturing, ASML and ZEISS are in parallel ramping up their activities on an EUV exposure tool with an NA of 0.55. The purpose of this so-called high-NA scanner, targeting an ultimate resolution of 8nm, is to extend Moore’s law for another decade. A novel lens design, capable of providing the required Numerical Aperture, has been identified; this lens will be paired with new, faster stages and more accurate sensors enabling the tight focus and overlay control needed for future nodes. In this paper we will outline the advantages of High-NA, especially for managing the needed extreme low defect printing rates while maximizing the effective throughput for patterning economics. The imaging performance is being simulated based on expected surface figures of the illumination and projection optics. Next to this, an update will be given on the status of the developments at ZEISS and ASML. Buildings, cleanrooms and equipment are being constructed, mirror production is ramping up, many tests are carried out to ensure a smooth implementation.

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Jan Van Schoot, Sjoerd Lok, Eelco Van Setten, Ruben Maas, Kars Troost, Rudy Peeters, Jo Finders, Judon Stoeldraijer, Jos Benschop, Paul Graeupner, Peter Kuerz, Winfried Kaiser, and Thomas Stammler "High-NA EUV lithography exposure tool: key advantages and program progress", Proc. SPIE 11609, Extreme Ultraviolet (EUV) Lithography XII, 1160905 (22 February 2021); https://doi.org/10.1117/12.2583640

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