CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 11673 > Article
Presentation
5 March 2021 Silicon laser dicing with picosecond pulses at 2-µm wavelength
Markus Blothe, Maxime Chambonneau, Tobias Heuermann, Martin Gebhardt, Jens Limpert, Stefan Nolte
Author Affiliations +
Proceedings Volume 11673, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI; 116730L (2021) https://doi.org/10.1117/12.2579333
Event: SPIE LASE, 2021, Online Only
Abstract
We present a picosecond-laser-based modification process within the bulk of silicon at 2-µm wavelength. For optimizing the process to reliably generate defined modifications, different pulse durations in the span from femtoseconds to picoseconds and different focusing conditions at different depths in silicon were investigated. A predetermined cleavage plane was realized by transversal scanning. The force required to break the sample at the desired position was analyzed for the different processing conditions. Overall our results constitute the basis for picosecond-laser-based dicing of silicon.
Conference Presentation
© (2021) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Markus Blothe, Maxime Chambonneau, Tobias Heuermann, Martin Gebhardt, Jens Limpert, and Stefan Nolte "Silicon laser dicing with picosecond pulses at 2-µm wavelength", Proc. SPIE 11673, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI, 116730L (5 March 2021); https://doi.org/10.1117/12.2579333
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Silicon
Picosecond phenomena
Semiconductor lasers
Semiconducting wafers
Laser development
Femtosecond phenomena
Fiber lasers
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top