Development of surface relief diffractive structures in photoresist: analogy between its mathematical model and geometrical optics

Ivo Aubrecht; Miroslav Miler

doi:10.1117/12.190230

12 October 1994 Development of surface relief diffractive structures in photoresist: analogy between its mathematical model and geometrical optics

Ivo Aubrecht, Miroslav Miler

Author Affiliations +

Proceedings Volume 2169, Nonconventional Optical Imaging Elements; (1994) https://doi.org/10.1117/12.190230
Event: International Colloquium on Nonconventional Optical Imaging Elements, 1993, Rydzyna-Rokosowo, Poland

Abstract

In this paper, a close analogy between the theoretical model of forming the profile of a diffractive relief structure in photoresist during development and equations of geometrical optics is shown. It is used for the investigation of evolution of the grating profile arising in a positive photoresist layer which was exposed to the interference field of two laser beams. Verification of theoretical conclusions is based on comparison of theoretical and experimental time dependences of diffraction efficiencies of many orders during development. A SEM photography of the relief of a produced grating sample is presented as well. A short section is devoted to diffraction properties of the structures under study with emphasis on their possible applicability to multiple beam splitting.

Citation Download Citation

Ivo Aubrecht and Miroslav Miler "Development of surface relief diffractive structures in photoresist: analogy between its mathematical model and geometrical optics", Proc. SPIE 2169, Nonconventional Optical Imaging Elements, (12 October 1994); https://doi.org/10.1117/12.190230

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available