Polysilicon for everything?

M. C. L. Ward; Mark E. McNie; Robert J.T. Bunyan; David O. King; Roger Timothy Carline; Rebecca Wilson; J. P. Gillham

doi:10.1117/12.323901

8 September 1998 Polysilicon for everything?

M. C. L. Ward, Mark E. McNie, Robert J.T. Bunyan, David O. King, Roger Timothy Carline, Rebecca Wilson, J. P. Gillham

Proceedings Volume 3514, Micromachined Devices and Components IV; (1998) https://doi.org/10.1117/12.323901
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

We review some of the attractive attributes of microengineering and relate them to features of the highly successful silicon microelectronics industry. We highlight the need for cost effective functionality rather than ultimate performance as a driver for success and review key examples of polysilicon devices from this point of view. The effective exploitation of the data generated by the cost effective polysilicon sensors is also considered and we conclude that `non traditional' data analysis will need to be exploited if full use is to be made of polysilicon devices.

Citation Download Citation

M. C. L. Ward, Mark E. McNie, Robert J.T. Bunyan, David O. King, Roger Timothy Carline, Rebecca Wilson, and J. P. Gillham "Polysilicon for everything?", Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); https://doi.org/10.1117/12.323901

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