3D microstructuring with F2 lasers

Hans Kurt Toenshoff; Ferdinand von Alvensleben; Andreas Ostendorf; Klaus Koerber; Christian Kulik

doi:10.1117/12.397929

1 September 2000 3D microstructuring with F₂ lasers

Hans Kurt Toenshoff, Ferdinand von Alvensleben, Andreas Ostendorf, Klaus Koerber, Christian Kulik

Proceedings Volume 4075, Micro-Opto-Electro-Mechanical Systems; (2000) https://doi.org/10.1117/12.397929
Event: Symposium on Applied Photonics, 2000, Glasgow, United Kingdom

Abstract

F₂ lasers emitting radiation with a wavelength (lambda) equals 157 nm allow the direct laser based micro-structuring of materials like PTFE (e.g. Teflon) or quartz glass for MST-applications. This paper reports about the fundamental basis of controlling and modelling the structuring process and about existing tools for the 3-D micron structuring with F₂ excimer lasers. The concept of three-dimensional micro-structuring is based on gradual ablation, using single laser pulses. A CNC-controlled precision machining centre with a vacuum encapsulated beam guiding system has been developed. For the material processing with F₂ lasers a model of the single ablation size was qualified, which provides an exact description of the laser pulse taking the material properties, the energy density and the lateral dimensions of the single ablation into account. The non- linear characteristics between pulse geometry and process parameters were experimentally determined and implemented into software for automated NC-data generation. A special software tool makes the simulation of manufacturing micro-components possible. It is based on the complex NC-code and on the exact model of the single ablation. Using this simulation, the process parameters can be optimised before processing with a laser micro-machining centre. The described technology was verified by manufacturing 3-D micro-structures in several materials, such as quartz glass and PTFE.

Citation Download Citation

Hans Kurt Toenshoff, Ferdinand von Alvensleben, Andreas Ostendorf, Klaus Koerber, and Christian Kulik "3D microstructuring with F₂ lasers", Proc. SPIE 4075, Micro-Opto-Electro-Mechanical Systems, (1 September 2000); https://doi.org/10.1117/12.397929

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