Precise open-loop control of MEMS deformable mirror shape

Thomas Bifano; Jason Stewart; Alioune Diouf

doi:10.1117/12.769492

8 February 2008 Precise open-loop control of MEMS deformable mirror shape

Thomas Bifano, Jason Stewart, Alioune Diouf

Proceedings Volume 6888, MEMS Adaptive Optics II; 68880P (2008) https://doi.org/10.1117/12.769492
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

A new method is introduced for predicting control voltages that will generate a prescribed surface shape on a deformable mirror. The algorithm is based upon an analytical elastic model of the mirror membrane and an empirical electromechanical model of its actuators. It is computationally simple and inherently fast. Shapes at the limit of achievable mirror spatial frequencies with up to 1.5μm amplitudes have been achieved with less than 15nm RMS error.

Citation Download Citation

Thomas Bifano, Jason Stewart, and Alioune Diouf "Precise open-loop control of MEMS deformable mirror shape", Proc. SPIE 6888, MEMS Adaptive Optics II, 68880P (8 February 2008); https://doi.org/10.1117/12.769492

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