Picosecond laser ablation of transparent materials

Simone Russ; Christof Siebert; Urs Eppelt; Claudia Hartmann; Birgit Faißt; Wolfgang Schulz

doi:10.1117/12.2001991

15 March 2013 Picosecond laser ablation of transparent materials

Simone Russ, Christof Siebert, Urs Eppelt, Claudia Hartmann, Birgit Faißt, Wolfgang Schulz

Proceedings Volume 8608, Laser-based Micro- and Nanopackaging and Assembly VII; 86080E (2013) https://doi.org/10.1117/12.2001991
Event: SPIE LASE, 2013, San Francisco, California, United States

Abstract

Processing of thin and ultra-thin glass displays is becoming more important in the fast increasing market of display manufacturing. As conventional technologies such as mechanical scribing followed by manual breaking mostly lead to bad edge quality and thus to a huge amount of reject, other processes like ablation processes [1] with picosecond lasers are getting more and more interesting. However processing with ultrashort pulsed lasers partially leads to unwanted effects which should be understood in a better way by means of intensive basic research. Therefore the ablation mechanism of ultrashort pulses on transparent materials was investigated in this research project. On the one hand the ablation mechanism was analyzed in a simulative way by means of rate equations on the other hand by laboratory experiments.

Citation Download Citation

Simone Russ, Christof Siebert, Urs Eppelt, Claudia Hartmann, Birgit Faißt, and Wolfgang Schulz "Picosecond laser ablation of transparent materials", Proc. SPIE 8608, Laser-based Micro- and Nanopackaging and Assembly VII, 86080E (15 March 2013); https://doi.org/10.1117/12.2001991

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