Alexander Galkin
at Yuri Gagarin State Technical University of Saratov
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 9 April 2020 Paper
Proceedings Volume 11458, 1145803 (2020) https://doi.org/10.1117/12.2564423
KEYWORDS: Laser ablation, Microfabrication, Picosecond phenomena, Pulsed laser operation, Electron beams, Electronic components, Numerical simulations, Sputter deposition, Scanning electron microscopy, Waveguides

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