Mr. Armen S. Gharibyan Profile

Armen S. Gharibyan

at State Engineering Univ of Armenia

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Proceedings Article | 11 September 2010 Paper

Preparation and investigation of diamond-like carbon nanocomposite thin films for nanophotonics

Zh. Panosyan, A. Gharibyan, A. Sargsyan, H. Panosyan, D. Hayrapetyan, Y. Yengibaryan

Proceedings Volume 7755, 77550Q (2010) https://doi.org/10.1117/12.863079

KEYWORDS: Refractive index, Carbon, Nitrogen, Raman spectroscopy, Plasma, Silicon, Plasma enhanced chemical vapor deposition, Diamond, Nanophotonics, Nanocomposites

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Flexible Plasma Enhanced Chemical Vapor Deposition (PECVD) technology of Diamond Like Carbon (DLC) thin film preparation on the surface of Si and organic glasses has been elaborated. Modification of PECVD equipment has been implemented by integrating ion and magnetron sources. In this paper toluene (C₇H₈) has been used as a nanocmposite film forming hydrocarbon which decomposition yields to the multi component plasma in vacuum chamber. Nitrogen has been used as a dopand. Investigation of plasma composition influence to the optical and mechanical properties of DLC films has been observed. The presence of sp³ and sp² hybridization states have been proven by Raman spectroscopy and their ratios have been estimated with the help of I_D, I_G characteristic lines for different technological conditions. High precision refractive index and thickness measurements of DLC films have been implemented by means of laser ellipsometer. Refractive indices of prepared films have been varied in the region 1.5-3.1 and thicknesses have been varied in the region 50-250 nm. Extraordinary change in refractive index has been explained with the help of formation of differently sized sp² carbon based clusters in the sp³ matrix. Different types of carbon and hydrogen bonds have been observed in the obtained structures by means of FTIR. Obvious prospectives of DLC nanocomposite film as a promissing nanophotonic material has been discussed.

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