We present here experimental results and modeling of multilayer gratings developed for the EUV spectro-imager abroad Solar-C mission. Periodic Al/Mo/SiC multilayers were optimized and deposited by magnetron sputtering on high groove density lamellar gratings with various depths. All grating samples were characterized before and after multilayer deposition by atomic force microscopy (AFM) and by grazing incidence x-ray reflectometry (GIXR) at 8.05 keV. AFM measurements reveal the surface prole evolution when the number of deposited layers increases. This effect is confirmed with a transmission electron microscope cross-section analysis. The EUV diffraction efficiency of the multilayer gratings was measured by monochromatic synchrotron radiation on the XUV Metrology beamline at SOLEIL Synchrotron. The results are in good agreement with the model simulated by rigorous coupled-wave analysis and using structural parameters determined by AFM and GIXR. The measured near-normal incidence first-order efficiency reaches a maximum of about 9.27%, 6.54%, and 7.18% at wavelengths of 27.3 nm, 21.4 nm, and 19.4 nm respectively.
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