Achieving high degree of tunability in photonic devices has been a focal point in the field of integrated photonics for several decades, enabling a wide range of applications from telecommunication and biochemical sensing to fundamental quantum photonic experiments. We introduce a novel technique to engineer the thermal response of photonic devices resulting in large and deterministic wavelength shifts across various photonic platforms, such as amorphous Silicon Carbide (a-SiC), Silicon Nitride (SiN) and Silicon-On-Insulator (SOI). In this paper, we demonstrate bi-directional thermal tuning of photonic devices fabricated on a single chip. Our method can be used to design high-sensitivity photonic temperature sensors, low-power Mach-Zehnder interferometers and more complex photonics circuits.
Superconducting single-photon detectors (SSPDs) have developed into a mature device technology and excel due outstanding performance metrics, in particular high detection efficiency combined with high time resolution and low dark count rate for a wide wavelength range from the visible to the mid-infrared. In addition to commercially available systems with devices coupled to optical fibers, SSPDs can be integrated with photonic circuits using scalable nanofabrication technologies.
Here, we will present recent progress on SSPDs based on NbTiN thin films and their integration on different photonic material platforms. Our process for NbTiN growth at room temperature will be described, using magnetron reactive co-sputtering to achieve high-quality superconducting layers down to thicknesses of few nanometres. Optimized SSPD devices are realized by tuning the superconducting properties of NbTiN thin films, adjusting the material composition and nanocrystalline structure. The realization of different types of detectors and geometries will be shown, including nanofabrication techniques for achieving fully suspended nanowire structures. Furthermore, we will discuss challenges and prospects for scaling-up SSPD device technology as well as detector systems. Multiplexing schemes such as dispersion engineering of superconducting transmission lines will be highlighted as powerful approach to address multiple detectors and reduce the number of required feedthroughs and electrical lines in the cryostat. Eventually, exemplary applications of SSPDs for photon counting in quantum optics and light detection and ranging (LIDAR) will be outlined.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.