Mr. Chao Jung Chen Profile

Chao Jung Chen

Senior Engineer at SMIC

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Publications (1)

Proceedings Article | 27 January 2005 Paper

90-nm dual damascene patterning with a new via fill material

Chao Jung Chen, Xiang Yang Gao, Yi Shih Lin, Lien Huang Cheng, Chia Chu Kuo, GuoQiang Xing, De-Ling Zhou, Makoto Muramatsu, Masahiko Nakashima

Proceedings Volume 5645, (2005) https://doi.org/10.1117/12.575975

KEYWORDS: Etching, Silica, Plasma etching, Plasma, Optical lithography, Semiconducting wafers, Lithography, Coating, Dielectrics, Scanning electron microscopy

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