Daisuke Kawana
at Tokyo Ohka Kogyo America Inc
SPIE Involvement:
Conference Program Committee | Author
Publications (8)

Proceedings Article | 25 May 2022 Presentation + Paper
Proceedings Volume 12055, 120550J (2022) https://doi.org/10.1117/12.2614138
KEYWORDS: Polymer thin films, Dynamic light scattering

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Proceedings Volume 11612, 116120R (2021) https://doi.org/10.1117/12.2584067

Proceedings Article | 20 September 2020 Presentation
Proceedings Volume 11517, 115170G (2020) https://doi.org/10.1117/12.2574877
KEYWORDS: Polymers, Stochastic processes, Dispersion, Extreme ultraviolet, Line edge roughness, Molecules, Photons, Bridges, Chemical reactions, Diffusion

Proceedings Article | 31 May 2019 Paper
Proceedings Volume 10957, 109571R (2019) https://doi.org/10.1117/12.2514938
KEYWORDS: Polymers, Molecules, Quartz, Crystals, Polymer thin films, Extreme ultraviolet lithography, Diffusion, Complex systems, Chemically amplified resists, Lithography

Proceedings Article | 18 March 2016 Paper
Tatsuya Fujii, Shogo Matsumaru, Tomotaka Yamada, Yoshitaka Komuro, Daisuke Kawana, Katsumi Ohmori
Proceedings Volume 9776, 97760Y (2016) https://doi.org/10.1117/12.2218417
KEYWORDS: Extreme ultraviolet lithography, Optical lithography, Lithography, Diffusion, Extreme ultraviolet, Polymers, Chemically amplified resists, High volume manufacturing, Semiconductor manufacturing, Semiconductors, Quantum efficiency, Electrons, Semiconducting wafers

Showing 5 of 8 publications
Conference Committee Involvement (4)
International Conference on Extreme Ultraviolet Lithography 2024
30 September 2024 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography 2023
2 October 2023 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography 2022
26 September 2022 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography 2021
27 September 2021 | Online Only, United States
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