Dr. Daniele Murra Profile

Dr. Daniele Murra

Senior researcher at ENEA

SPIE Involvement:

Author

Publications (30)

Proceedings Article | 13 April 2020 Presentation + Paper

Accurate and low-cost ENEA solar compass for precision metrology of true azimuth: instrumental and smart versions

S. Bollanti, F. Andreoli, L. Cafarella, D. De Meis, P. Di Lazzaro, D. Di Mauro, F. Flora, G. P. Gallerano, L. Mezi, D. Murra, L. Murra, D. Vicca, G. Vicoli, A. Zirizzotti

Proceedings Volume 11352, 1135216 (2020) https://doi.org/10.1117/12.2555747

KEYWORDS: Sun, Sensors, Magnetism, Global Positioning System, Calibration

Read Abstract +

Proceedings Article | 3 January 2019 Paper

The ENEA discharge produced plasma extreme ultraviolet source and its patterning applications

L. Mezi, S. Bollanti, S. Botti, G. Brusatin, L. Businaro, G. Della Giustina, P. Di Lazzaro, M. Fagnoni, F. Flora, A. Gerardino, D. Murra, S. Protti, A. Torre, E. Torti

Proceedings Volume 11042, 110420Z (2019) https://doi.org/10.1117/12.2522469

KEYWORDS: Extreme ultraviolet, Plasma, Graphene, Photomasks, Optical lithography, Extreme ultraviolet lithography, Spatial resolution, Silicon, Photoresist materials, Lithography

Read Abstract +

Proceedings Article | 3 January 2019 Paper

Influence of ultraviolet radiation on the color of blood stains embedded in the archaeological textile known as the Shroud of Turin

Paolo Di Lazzaro, Daniele Murra, Paola Iacomussi, Mauro Missori, Antonio Di Lascio

Proceedings Volume 11042, 1104214 (2019) https://doi.org/10.1117/12.2522112

KEYWORDS: Blood, Ultraviolet radiation, Lamps, RGB color model, Absorbance, Laser damage threshold, Visible radiation, Light sources and illumination, Reflectivity

Read Abstract +

Proceedings Article | 22 October 2013 Paper

Lidar sounding of volcanic plumes

Luca Fiorani, Alessandro Aiuppa, Federico Angelini, Rodolfo Borelli, Mario Del Franco, Daniele Murra, Marco Pistilli, Adriana Puiu, Simone Santoro

Proceedings Volume 8894, 889407 (2013) https://doi.org/10.1117/12.2028364

KEYWORDS: LIDAR, Carbon dioxide, Aerosols, Absorption, Carbon dioxide lasers, Sensors, Dye lasers, Telescopes, Atmospheric particles, Molecules

Read Abstract +

Proceedings Article | 30 January 2013 Paper

Extreme ultraviolet marking system for anti-counterfeiting tags with adjustable security level

P. Di Lazzaro, S. Bollanti, F. Flora, L. Mezi, D. Murra, A. Torre, F. Bonfigli, R. M. Montereali, M. A. Vincenti

Proceedings Volume 8677, 86770T (2013) https://doi.org/10.1117/12.2010400

KEYWORDS: Extreme ultraviolet, Laser induced fluorescence, Extreme ultraviolet lithography, Photomasks, Patents, Microscopes, Luminescence, Transistors, Ultraviolet radiation, Adhesives

Read Abstract +

Proceedings Article | 22 April 2009 Paper

A laser-plasma clean soft x-ray source for projection microlithography

S. Bollanti, P. Di Lazzaro, F. Flora, L. Mezi, D. Murra, A. Torre

Proceedings Volume 7131, 713116 (2009) https://doi.org/10.1117/12.816912

KEYWORDS: Mirrors, Extreme ultraviolet, Photomasks, Projection lithography, Plasmas, Projection systems, X-ray sources, Krypton, Laser development, Optical filters

Read Abstract +

Proceedings Article | 22 April 2009 Paper

Colouring fabrics with excimer lasers to simulate encoded images: the case of the Shroud of Turin

P. Di Lazzaro, G. Baldacchini, G. Fanti, D. Murra, A. Santoni

Proceedings Volume 7131, 71311R (2009) https://doi.org/10.1117/12.816826

KEYWORDS: Ultraviolet radiation, Excimer lasers, Laser damage threshold, Laser irradiation, Optical simulations, Laser ablation, Pulsed laser operation, Gas lasers, Image acquisition, Electromagnetism

Read Abstract +

Proceedings Article | 2 October 2007 Paper

Progress report on a 14.4-nm micro-exposure tool based on a laser-produced-plasma: debris mitigation system results and other issues

S. Bollanti, D. Amodio, A. Conti, P. Di Lazzaro, F. Flora, L. Mezi, D. Murra, A. Torre, C. Zheng, D. Garoli, M. Pelizzo, P. Nicolosi, V. Mattarello, V. Rigato, A. Gerardino

Proceedings Volume 6703, 670308 (2007) https://doi.org/10.1117/12.751442

KEYWORDS: Mirrors, Krypton, Argon, Extreme ultraviolet, Fluctuations and noise, Reflectivity, Plasma, Extreme ultraviolet lithography, Glasses, Copper

Read Abstract +

Proceedings Article | 26 April 2007 Paper

Excimer-laser-driven EUV plasma source for one-shot one-pattern projection microlithography

P. Di Lazzaro, G. Altieri, D. Amodio, S. Bollanti, A. Conti, F. Flora, T. Letardi, L. Mezi, D. Murra, E. Tefouet Kana, A. Torre, C. E. Zheng

Proceedings Volume 6346, 63460M (2007) https://doi.org/10.1117/12.738084

KEYWORDS: Extreme ultraviolet, Plasma, Mirrors, Extreme ultraviolet lithography, Databases, Excimer lasers, X-rays, Pulsed laser operation, Photoresist materials, Prototyping

Read Abstract +

Proceedings Article | 15 October 2005 Paper

Mask tilt effects counteracted by wafer tilts in a Schwarzschild objective based EUV lithography setup

S. Bollanti, P. Di Lazzaro, F. Flora, L. Mezi, D. Murra, A. Torre

Proceedings Volume 5962, 59622Y (2005) https://doi.org/10.1117/12.624845

KEYWORDS: Photomasks, Semiconducting wafers, Extreme ultraviolet lithography, Mirrors, Wafer-level optics, Zemax, Solids, Extreme ultraviolet, Image resolution, Microscopes

Read Abstract +

Proceedings Article | 12 October 2005 Paper

Recent results of laser-driven EUV and soft x-rays plasma source at ENEA Frascati

P. Di Lazzaro, S. Bollanti, A. Conti, F. Flora, L. Mezi, D. Murra, C. Zheng

Proceedings Volume 5958, 595814 (2005) https://doi.org/10.1117/12.621079

KEYWORDS: Plasma, Krypton, Extreme ultraviolet, Tantalum, Pulsed laser operation, Copper, Ions, X-rays, Excimer lasers, Solids

Read Abstract +

Proceedings Article | 23 March 2005 Paper

Beam homogenization: theory, modeling, and application to an excimer laser beam

E. Tefouet Kana, S. Bollanti, P. Di Lazzaro, D. Murra

Proceedings Volume 5777, (2005) https://doi.org/10.1117/12.611252

KEYWORDS: Zoom lenses, Homogenization, CCD cameras, Excimer lasers, Beam splitters, Modeling, Geometrical optics, Wavefronts, Charge-coupled devices, Beam shaping

Read Abstract +

Proceedings Article | 23 March 2005 Paper

Flat-top shaped laser beams: reliability of standard parameters

P. Di Lazzaro, S. Bollanti, D. Murra, E. Tefouet Kana, G. Felici

Proceedings Volume 5777, (2005) https://doi.org/10.1117/12.611248

KEYWORDS: Standards development, Beam shaping, Reliability, Nd:YAG lasers, Excimer lasers, Zoom lenses, Near field, Excimers, CCD cameras, Modulation

Read Abstract +

Proceedings Article | 7 January 2004 Paper

Highly efficient x-ray imaging and backlighting schemes based on spherically bent crystals

Tatiana Pikuz, Anatoly Faenov, Igor Skobelev, Alexandr Magunov, Manuel Sanchez del Rio, Lucia Alianelli, Giuseppe Baldacchini, Francesco Flora, Sarra Bollanti, Paulo Di Lazzaro, Daniele Murra, Giuseppe Tomassetti, Antonio Ritucci, Armando Reale, Lucia Reale, Massimo Francucci, Sergio Martellucci, Giovanni Petrocelli

Proceedings Volume 5196, (2004) https://doi.org/10.1117/12.503580

KEYWORDS: Crystals, Plasma, Spatial resolution, X-ray imaging, X-rays, Sensors, Monochromatic aberrations, Spherical lenses, Mica, Magnesium

Read Abstract +

Proceedings Article | 7 January 2004 Paper

Lithium fluoride coloration by laser-plasma soft x-rays: a promising tool for x-ray microscopy and photonics

Francesco Flora, Giuseppe Baldacchini, Francesca Bonfigli, Antonella Lai, Tiziana Marolo, Luca Mezi, Rosa Maria Montereali, Daniele Murra, Nicola Lisi, Enrico Nichelatti, Anatoly Faenov, Tatiana Pikuz, Libero Palladino, Armando Reale, Antonio Ritucci, Lucia Reale, Giuseppe Tomassetti, Pasquale Fabi, Tania Limongi

Proceedings Volume 5196, (2004) https://doi.org/10.1117/12.505782

KEYWORDS: Laser induced fluorescence, Fluorine, Lithium, X-rays, Crystals, X-ray microscopy, Extreme ultraviolet, Luminescence, X-ray lasers, Sensors

Read Abstract +

Proceedings Article | 14 November 2003 Paper

A laser beam homogenizer with a variable output cross section

Daniele Murra, Paolo Di Lazzaro, Sarah Bollanti, Giuseppe Felici

Proceedings Volume 5147, (2003) https://doi.org/10.1117/12.537572

KEYWORDS: Zoom lenses, Optical components, Excimer lasers, Silicon, Software development, Near field, Laser applications, Spherical lenses, Geometrical optics, CCD cameras

Read Abstract +

Proceedings Article | 10 November 2003 Paper

A novel light beam homogenizer

Paolo Di Lazzaro, S. Bollanti, D. Murra, G. Felici

Proceedings Volume 5120, (2003) https://doi.org/10.1117/12.515490

KEYWORDS: Beam shaping, Zoom lenses, Lenses, Excimer lasers, Charge-coupled devices, Optical design, Optical components, Semiconductor lasers, Beam homogenizers, Near field

Read Abstract +

Proceedings Article | 9 April 2003 Paper

High-resolution and high-efficiency coloration of lithium fluoride by soft x-ray irradiation

Giuseppe Baldacchini, Francesca Bonfigli, Francesco Flora, Rosamaria Montereali, Daniele Murra, Nicola Lisi, Enrico Nichelatti, Tatiana Pikuz, Anatoly Faenov, Tania Limongi, Libero Palladino, Lucia Reale

Proceedings Volume 5131, (2003) https://doi.org/10.1117/12.513681

KEYWORDS: Laser induced fluorescence, X-rays, Extreme ultraviolet, Crystals, X-ray microscopy, X-ray imaging, Polymethylmethacrylate, X-ray detectors, Sensors, Plasma

Read Abstract +

Proceedings Article | 9 April 2003 Paper

New light-beam homogenizer technology

Paolo Di Lazzaro, Sarah Bollanti, Giuseppe Felici, Daniele Murra

Proceedings Volume 5131, (2003) https://doi.org/10.1117/12.513517

KEYWORDS: Beam shaping, Zoom lenses, Lenses, Excimer lasers, Charge-coupled devices, Optical design, Optical components, Patents, Laser applications, Semiconductor lasers

Read Abstract +

Proceedings Article | 9 April 2003 Paper

Considerations about self-filtering unstable resonators

Sarah Bollanti, Paolo Di Lazzaro, Daniele Murra, Cheng En Zheng

Proceedings Volume 5131, (2003) https://doi.org/10.1117/12.513678

KEYWORDS: Resonators, Mirrors, Confocal microscopy, Optical resonators, Diffraction, Laser resonators, Sinc filters, Laser applications, Geometrical optics, Gas lasers

Read Abstract +

Proceedings Article | 25 January 2001 Paper

Amorphous silicon crystallization by a long-pulse excimer laser

Paolo Di Lazzaro, Sarah Bollanti, Francesca Bonfigli, Francesco Flora, Gualtiero Giordano, Tommaso Letardi, Daniele Murra, Cheng En Zheng, Alessandro Baldesi

Proceedings Volume 4184, (2001) https://doi.org/10.1117/12.413991

KEYWORDS: Amorphous silicon, Excimer lasers, Crystals, Laser crystals, Annealing, Silicon, Laser energy, Zoom lenses, Glasses, X-rays

Read Abstract +

Proceedings Article | 3 April 2000 Paper

Beam quality of a XeCl excimer laser vs. the repetition rate

Paolo Di Lazzaro, Sarah Bollanti, Francesca Bonfigli, Francesco Flora, Tommaso Letardi, Daniele Murra

Proceedings Volume 3889, (2000) https://doi.org/10.1117/12.380907

KEYWORDS: Pulsed laser operation, Near field, Excimer lasers, Mirrors, Resonators, Laser energy, Oscillators, Ultraviolet radiation, Laser beam diagnostics, Laser resonators

Read Abstract +

Proceedings Article | 25 February 2000 Paper

Experimental results on silicon annealing by a long-pulse high-power XeCl laser system

Daniele Murra, Sarah Bollanti, Francesca Bonfigli, D. Della Sala, Paolo Di Lazzaro, Tommaso Letardi

Proceedings Volume 4070, (2000) https://doi.org/10.1117/12.378178

KEYWORDS: Silicon, Semiconductor lasers, Annealing, Amorphous silicon, Excimer lasers, Pulsed laser operation, High power lasers, Glasses, Laser energy, Copper

Read Abstract +

Proceedings Article | 7 February 2000 Paper

Industrial large-aperture XeCl laser for surface processing

Tommaso Letardi, Alessandro Baldesi, Sarah Bollanti, Francesca Bonfigli, Paolo Di Lazzaro, Francesco Flora, Gualtiero Giordano, Alessandro Marinai, Daniele Murra, Giovanni Schina, Cheng En Zheng

Proceedings Volume 3888, (2000) https://doi.org/10.1117/12.377068

KEYWORDS: X-rays, Silicon, Diodes, Semiconductor lasers, Amorphous silicon, Laser sources, Pulsed laser operation, Copper, Capacitors, Gas lasers

Read Abstract +

Proceedings Article | 22 December 1998 Paper

X-ray diode with spark plug plasma cathodes

Sarah Bollanti, Paolo Di Lazzaro, Francesco Flora, Gualtiero Giordano, Tommaso Letardi, Daniele Murra, Giovanni Schina, Cheng En Zheng

Proceedings Volume 3574, (1998) https://doi.org/10.1117/12.334409

KEYWORDS: Diodes, X-rays, Plasma, Surface plasmons, Capacitors, Astatine, Ionization, Electrodes, Gas lasers, Excimer lasers

Read Abstract +

Proceedings Article | 14 July 1998 Paper

Definition and measurement of the times-diffraction-limit number of high-power laser beams

Sarah Bollanti, Paolo Di Lazzaro, Daniele Murra

Proceedings Volume 3423, (1998) https://doi.org/10.1117/12.316570

KEYWORDS: Diffraction, Beam shaping, Near field, Resonators, Laser systems engineering, High power lasers, Fourier transforms, Excimer lasers, Mirrors, Optical testing

Read Abstract +

Proceedings Article | 4 April 1997 Paper

Comparison of beam quality parameters of two high-peak power eximer laser beams

Sarah Bollanti, Paolo Di Lazzaro, Francesco Flora, Gualtiero Giordano, Tommaso Letardi, Giovanni Schina, Daniele Murra, C. Petrucci, Olivier Uteza, Cheng En Zheng

Proceedings Volume 3092, (1997) https://doi.org/10.1117/12.270259

KEYWORDS: Excimer lasers, Optical testing, Laser systems engineering, Resonators, Near field, Fourier transforms, Solids, Laser resonators, Pulsed laser operation, Confocal microscopy

Read Abstract +

Proceedings Article | 20 November 1996 Paper

Beam quality characterization and times-diffraction-limit estimation of two high-power excimer lasers

Sarah Bollanti, Paolo Di Lazzaro, Daniele Murra

Proceedings Volume 2870, (1996) https://doi.org/10.1117/12.259919

KEYWORDS: Near field, Beam analyzers, Solids, Beam shaping, Resonators, Spatial coherence, Excimer lasers, Laser systems engineering, Fourier transforms, High power lasers

Read Abstract +

Proceedings Article | 26 August 1996 Paper

Near-diffraction-limited excimer laser beam from a XeCl POPA system

Sarah Bollanti, Paolo Di Lazzaro, Francesco Flora, Gualtiero Giordano, Tommaso Letardi, Daniele Murra, C. Petrucci, Giovanni Schina, Olivier Uteza, Cheng En Zheng

Proceedings Volume 2788, (1996) https://doi.org/10.1117/12.248600

KEYWORDS: Oscillators, Diffraction, Near field, Excimer lasers, Resonators, Mirrors, Optical testing, Optical amplifiers, Gas lasers, Beam shaping

Read Abstract +

Proceedings Article | 28 October 1992 Paper

Electromagnetic vacuum confinement effects in the optical microscopic cavity

Francesco De Martini, Michele Marrocco, Paolo Mataloni, Daniele Murra

Proceedings Volume 1726, (1992) https://doi.org/10.1117/12.140329

KEYWORDS: Mirrors, Optical microcavities, Chemical species, Metals, Multilayers, Optical coatings, Electromagnetism, Anisotropy, Semiconductors, Quantum optics

Read Abstract +

Showing 5 of 30 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years