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Hao Wang
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Publications (3)
Proceedings Article | 10 April 2024 Presentation + Paper
Advanced processing control for wafer-to-wafer hybrid bonding
Nikhil Aditya Kumar Roy, Richard Housley, Dan Engelhard, Hao Wang, Cassie Bayless, Chris Nguyen, Franz Zach, Shubham Badjate, Abhishek Gottipati, Yoav Grauer, Oren Ben-Nun, Roie Volkovich
Proceedings Volume 12955, 129551Q (2024) https://doi.org/10.1117/12.3010036
KEYWORDS: Wafer bonding, Overlay metrology, Semiconducting wafers, Process control, Metrology, 3D metrology, Optical parametric oscillators, Advanced process control, 3D acquisition, Distortion
Proceedings Article | 10 April 2024 Presentation + Paper
Small pitch overlay imaging metrology targets for tight OPO control
Proceedings Volume 12955, 129551V (2024) https://doi.org/10.1117/12.3009769
KEYWORDS: Overlay metrology, Semiconducting wafers, Light sources and illumination, Metrology, Imaging metrology
Proceedings Article | 10 April 2024 Presentation + Paper
Advanced FTIR optical modeling for hydrogen content measurements in 3D NAND cell nitride and amorphous carbon hard mask
Proceedings Volume 12955, 129550H (2024) https://doi.org/10.1117/12.3010524
KEYWORDS: Hydrogen, FT-IR spectroscopy, Semiconducting wafers, Silicon nitride, Absorbance, Wafer bonding, Modeling, Amorphous carbon, Deconvolution, Chemical analysis
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