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Ranga Reddy
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Publications (1)
Proceedings Article | 10 April 2024 Presentation + Paper
Small pitch overlay imaging metrology targets for tight OPO control
Nikhil Aditya Kumar Roy, Richard Housley, Suresh Kumar, Ranga Reddy, Dan Engelhard, Hao Wang, Atsushi Miyafuji, Toshiharu Nishiyama, Yoel Feler, Diana Shaphirov, Mark Ghinovker, Ido Ashuah, Yoav Grauer, Yonglei Li
Proceedings Volume 12955, 129551V (2024) https://doi.org/10.1117/12.3009769
KEYWORDS: Overlay metrology, Semiconducting wafers, Light sources and illumination, Metrology, Imaging metrology
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