Dr. Heeyoon Han Profile

Dr. Heeyoon Han

at SAMSUNG Electronics Co Ltd

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Author

Publications (2)

Proceedings Article | 27 April 2023 Presentation + Paper

Detection of defective areas and hidden weak patterns in the wafer using massive measurement data

DongHoon Kim, Sungyoon Ryu, Sunhong Jun, Heeyoon Han, Wonjun Choi, Yong-Ju Jeon, Hyun Lee, Souk Kim, Younghoon Sohn

Proceedings Volume 12496, 124961Y (2023) https://doi.org/10.1117/12.2657064

KEYWORDS: Semiconducting wafers, Signal detection, Defect detection, Metrology, Signal processing, Semiconductors, Semiconductor manufacturing, Fourier transforms, Fabrication

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Proceedings Article | 26 May 2022 Poster + Presentation + Paper

Improved fab-out EDS prediction of memory device using effective accuracy equation

Heeyoon Han, Wansik Nam, Hyeungcheol Mun, Sangbong Lee, Sungyoon Ryu, Younghoon Sohn

Proceedings Volume 12053, 120531S (2022) https://doi.org/10.1117/12.2613619

KEYWORDS: Binary data, Metrology, Distortion, Semiconducting wafers, Semiconductors, Manufacturing, Data conversion, Data modeling, Yield improvement, Optics manufacturing

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