Dr. Jian Lu
at NAIST
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 9 January 2008 Paper
Y. Zhang, T. Ikehara, J. Lu, T. Kobayashi, M. Ichiki, T. Itoh, R. Maeda
Proceedings Volume 6800, 68001V (2008) https://doi.org/10.1117/12.759296
KEYWORDS: Temperature metrology, Metals, Confocal microscopy, Microfabrication, Finite element methods, Sensor technology, Gold, Molybdenum, Microelectromechanical systems, Temperature sensors

Proceedings Article | 9 January 2008 Paper
Jian Lu, Tsuyoshi Ikehara, Yi Zhang, Takashi Mihara, Ryutaro Maeda
Proceedings Volume 6800, 68001Y (2008) https://doi.org/10.1117/12.759393
KEYWORDS: Ferroelectric materials, Silicon, Resonators, Microelectromechanical systems, Sensors, Scanning electron microscopy, Mechanical sensors, Solids, Electrodes, Signal attenuation

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top