Dr. Yi Zhang Profile

Dr. Yi Zhang

at National Institute of Advanced Industrial Science and Technology

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Publications (2)

Proceedings Article | 9 January 2008 Paper

Mechanical quality factor of microcantilevers for mass sensing applications

Jian Lu, Tsuyoshi Ikehara, Yi Zhang, Takashi Mihara, Ryutaro Maeda

Proceedings Volume 6800, 68001Y (2008) https://doi.org/10.1117/12.759393

KEYWORDS: Ferroelectric materials, Silicon, Resonators, Microelectromechanical systems, Sensors, Scanning electron microscopy, Mechanical sensors, Solids, Electrodes, Signal attenuation

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Proceedings Article | 9 January 2008 Paper

Novel MEMS-based thermometer with low power consumption for health-monitoring network application

Y. Zhang, T. Ikehara, J. Lu, T. Kobayashi, M. Ichiki, T. Itoh, R. Maeda

Proceedings Volume 6800, 68001V (2008) https://doi.org/10.1117/12.759296

KEYWORDS: Temperature metrology, Metals, Confocal microscopy, Microfabrication, Finite element methods, Sensor technology, Gold, Molybdenum, Microelectromechanical systems, Temperature sensors

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