Dr. Joseph F. Ellison Profile

Dr. Joseph F. Ellison

Optical Engineer III/Research & Development

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Author

Publications (6)

Proceedings Article | 26 September 2013 Paper

Benefits of ion milling ULE as compared to glass ceramics

J. Ellison, G. Cox, L. Sutton, A. Fox, T. Rich, T. Sebring

Proceedings Volume 8860, 88600O (2013) https://doi.org/10.1117/12.2023532

KEYWORDS: Ions, Glasses, Ion beams, Ceramics, Surface roughness, Birefringence, Polishing, Surface finishing, Optics manufacturing, Mirrors

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Proceedings Article | 20 May 2004 Paper

Measuring thermal expansion variations in ULE glass with interferometry

Brian Harper, Kenneth Hrdina, W. David Navan, Joseph Ellison, Andrew Fanning

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.535133

KEYWORDS: Glasses, Ultrasonics, Refractive index, Prisms, Interferometry, Metrology, Extreme ultraviolet lithography, Photomasks, Spatial resolution, Refraction

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Proceedings Article | 22 December 2003 Paper

Characterization of symmetric aberrations in aspheric surfaces using noncontact profilometry

Joseph Ellison, Steven VanKerkhove

Proceedings Volume 5180, (2003) https://doi.org/10.1117/12.508042

KEYWORDS: Aspheric lenses, Interferometers, Interferometry, Spherical lenses, Optical testing, Plano, Lenses, Error analysis, Optical spheres, Spindles

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Proceedings Article | 14 September 2001 Paper

Achieving low-wavefront specifications for DUV lithography: impact of residual stress in HPFS fused silica

Julie Ladison, Joseph Ellison, Douglas Allan, David Fladd, Andrew Fanning, Richard Priestley

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435680

KEYWORDS: Birefringence, Silica, Wavefronts, Wavefront distortions, Refraction, Refractive index, Interferometers, Interferometry, Lithography, Deep ultraviolet

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Proceedings Article | 11 November 1999 Paper

Polished homogeneity testing of Corning fused silica boules

Andrew Fanning, Joseph Ellison, Daniel Green

Proceedings Volume 3782, (1999) https://doi.org/10.1117/12.369224

KEYWORDS: Polishing, Silica, Wavefronts, Surface finishing, Interferometers, Reflection, Time metrology, Refraction, National Ignition Facility, Interferometry

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Proceedings Article | 2 February 1995 Paper

Vibration control of equipment aboard spacecraft

Goodarz Ahmadi, Joseph Ellison, Carlos Grodsinsky

Proceedings Volume 2427, (1995) https://doi.org/10.1117/12.200935

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Showing 5 of 6 publications

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