The performance of the optical elements at-wavelength measurement is affects by the synchrotron radiation beam divergence angle, and it is necessary to modulate a highly collimated X-ray as the measurement beam. In this paper, a multiple-crystal X-ray diffraction system composed by the channel-cut crystal, which is used to suppress the angular divergence of the synchrotron radiation beam. The Si(111) channel-cut crystal should work at the energy range of 10- 18keV, which can suppress the angular divergence of the beam lower than the Darwin width of the double crystals. The divergence angle was measured by the Si(111) analyzer is 2.9″@10keV at the vertical direction and 2.01″@18keV at the horizontal direction. The measurement results shows that the channel-cut crystal can suppress the synchrotron beam divergence angle and provide a high collimated light for the at-wavelength measurement of the optical components.
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