Dr. Kang-ill Seo
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12495, 124950L (2023) https://doi.org/10.1117/12.2658187
KEYWORDS: Nanosheets, Logic, Design and modelling, Fin field effect transistors, Field effect transistors, Transistors, Optical lithography, Industry, Metals, Double patterning technology

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top