Sanghoon Baek
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12495, 124950L (2023) https://doi.org/10.1117/12.2658187
KEYWORDS: Nanosheets, Logic, Design and modelling, Fin field effect transistors, Field effect transistors, Transistors, Optical lithography, Industry, Metals, Double patterning technology

Proceedings Article | 30 December 2008 Paper
Sang-Hoon Baek, Ha-Young Kim, Young-Keun Lee, Duck-Yang Jin, Se-Chang Park, Jun-Dong Cho
Proceedings Volume 7268, 72680C (2008) https://doi.org/10.1117/12.813462
KEYWORDS: Metals, Computer aided design, Standards development, Design for manufacturing, Logic, Multiplexers, Transistors, Design for manufacturability, Silicon, Manufacturing

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