Ms. Kayley E. Waltz Profile

Kayley E. Waltz

at Johns Hopkins University

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Publications (2)

Proceedings Article | 12 November 2024 Poster + Paper

All-dry zinc-imidazolate resists for electron beam and EUV lithography

Kayley Waltz, Patrick Eckhert, Peter Corkery, Mueed Ahmad, Andrea Kraetz, Yurun Miao, Dennis Lee, Mohammed Abdel-Rahman, Yucheng Lan, Paul Haghi-Ashtiani, Aaron Stein, J. Anibal Boscoboinik, Michael Tsapatsis, D. Howard Fairbrother

Proceedings Volume 13215, 132151D (2024) https://doi.org/10.1117/12.3050172

KEYWORDS: Extreme ultraviolet lithography, Silicon, Electron beam lithography, Photoresist processing, Lithography, Metals, Atomic layer deposition, Semiconducting wafers, Electron beams

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Proceedings Article | 9 April 2024 Presentation + Paper

Amorphous zinc-imidazolate all-dry resists

Proceedings Volume 12957, 129570H (2024) https://doi.org/10.1117/12.3010916

KEYWORDS: Etching, Electron beam lithography, Plasma etching, Lithography, Photoresist developing

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