Mr. Maciej Kaminski Profile

Maciej Kaminski

at Institute of Microelectronics and Photonics

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Publications (1)

Proceedings Article | 13 March 2019 Presentation

Fabrication and characterization of high-voltage AlGaN/GaN HEMTs on silicon substrates (Conference Presentation)

Anna Szerling, Marek Ekielski, Maciej Kozubal, Karolina Pagowska, Andrzej Taube, Marek Guziewicz, Maciej Kaminski, Kamil Kosiel, Krystyna Golaszewska-Malec, Renata Kruszka, Iwona Sankowska, Anna Piotrowska, Joanna Zdunek, Boguslawa Adamczyk-Cieślak

Proceedings Volume 10918, 1091818 (2019) https://doi.org/10.1117/12.2510415

KEYWORDS: Field effect transistors, Silicon, Etching, Plasma treatment, Transistors, Switching, Transmission electron microscopy, Ion implantation, Oxides, Argon

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