Dr. Nina V. Dziomkina Profile

Dr. Nina V. Dziomkina

at ASML Netherlands BV

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 17 April 2014 Paper

Progress on EUV pellicle development

Carmen Zoldesi, Kursat Bal, Brian Blum, Guus Bock, Derk Brouns, Florian Dhalluin, Nina Dziomkina, Juan Diego Arias Espinoza, Joost de Hoogh, Silvester Houweling, Maarten Jansen, Mohammad Kamali, Alain Kempa, Ronald Kox, Robert de Kruif, Jorge Lima, Yang Liu, Henk Meijer, Hans Meiling, Ijen van Mil, Marco Reijnen, Luigi Scaccabarozzi, Daniel Smith, Beatrijs Verbrugge, Laurens de Winters, Xugang Xiong, John Zimmerman

Proceedings Volume 9048, 90481N (2014) https://doi.org/10.1117/12.2049276

KEYWORDS: Pellicles, Extreme ultraviolet, Semiconducting wafers, Reticles, Prototyping, Silicon, Manufacturing, Particles, Critical dimension metrology, Protactinium

Read Abstract +

Proceedings Article | 1 April 2013 Paper

Investigation of EUV pellicle feasibility

Luigi Scaccabarozzi, Dan Smith, Pedro Rizo Diago, Eric Casimiri, Nina Dziomkina, Henk Meijer

Proceedings Volume 8679, 867904 (2013) https://doi.org/10.1117/12.2015833

KEYWORDS: Pellicles, Extreme ultraviolet, Particles, Reticles, Extreme ultraviolet lithography, Neodymium, Semiconducting wafers, Scanners, Manufacturing, Ultraviolet radiation

Read Abstract +

Proceedings Article | 5 April 2011 Paper

Improved immersion scanning speed using superhydrophobic surfaces

Arun Kumar Gnanappa, Evangelos Gogolides, Emilien Feuillet, Fabrizio Evangelista, Nina Dziomkina, Michel Riepen

Proceedings Volume 7973, 79732C (2011) https://doi.org/10.1117/12.881605

KEYWORDS: Semiconducting wafers, Polymethylmethacrylate, Liquids, Water, Satellites, Plasma, Capillaries, Immersion lithography, Thin films, Oxygen

Read Abstract +

Proceedings Article | 27 August 2005 Paper

Control of polymer colloidal crystal structure and orientation on patterned substrates by electrophoresis

Nina Dziomkina, Mark Hempenius, G. Julius Vancso

Proceedings Volume 5931, 59310Z (2005) https://doi.org/10.1117/12.614867

KEYWORDS: Crystals, Electrodes, Particles, Crystallography, Polymers, Scanning electron microscopy, Optical lithography, Photonic crystals, Dielectrics, Lithography

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years