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Dr. Qingjun Zhou
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Publications (1)
Proceedings Article | 28 March 2016 Paper
Edge roughness characterization of advanced patterning processes using power spectral density analysis (PSD)
Shimon Levi, Ishai Schwarzband, Roman Kris, Ofer Adan, Elly Shi, Ying Zhang, Kevin Zhou
Proceedings Volume 9782, 97820I (2016) https://doi.org/10.1117/12.2220814
KEYWORDS: Line edge roughness, Etching, Line width roughness, Scanning electron microscopy, Edge roughness, Optical lithography, Signal to noise ratio, Statistical analysis, Lithography, Stochastic processes
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