Ms. Sern Loong Ng Profile

Sern Loong Ng

Applications Manager at Applied Materials South East Asia Pte Ltd

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 4 April 2007 Paper

Automatic setup of in-line critical dimension (CD) recipes during OPC qualification in a foundry environment

Yasri Yudhistira, Quek Shyue Fong, Chan Sun Sun, Koh Hui Peng, Rachel Ren, Sern Loong Ng, Amit Siany, Shimon Levi

Proceedings Volume 6518, 651809 (2007) https://doi.org/10.1117/12.712534

KEYWORDS: Optical proximity correction, Computer aided design, Semiconducting wafers, Scanning electron microscopy, Pattern recognition, Optical alignment, Wafer-level optics, Data modeling, Etching, Target recognition

Read Abstract +

Proceedings Article | 24 March 2006 Paper

A novel approach to characterize trench depth and profile using the 3D tilt capability of a critical dimension-scanning electron microscope at 65nm technology mode

R. Srivastava, P. Yelehanka, H. A. Kek, S. L. Ng, V. Srinivasan, R. Peltinov

Proceedings Volume 6152, 61524I (2006) https://doi.org/10.1117/12.659717

KEYWORDS: Semiconducting wafers, Etching, Metals, 3D metrology, Critical dimension metrology, Nondestructive evaluation, Electron microscopes, Copper, Stereoscopy, Dielectrics

Read Abstract +

Proceedings Article | 24 May 2004 Paper

Productivity and yield improvement through implementation of automated defect review SEM at 45° column tilt in a high-capacity production Fab

Jackie Tan, Sandeep Kulkarni, Sern Ng, Alok Jain, Vish Srinivasan, Nurit Raccah, Ofer Rotlevi

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.534872

KEYWORDS: Scanning electron microscopy, Particles, Semiconducting wafers, Etching, Inspection, Metals, Yield improvement, Bridges, Silicon, Optical alignment

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years