Mr. Tejaswi K. Indukuri Profile

Tejaswi K. Indukuri

Graduate Student Researcher at Intel Corp

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Author

Publications (5)

Proceedings Article | 28 March 2014 Paper

Patterning challenges in the fabrication of 12 nm half-pitch dual damascene copper ultra low-k interconnects

J. Chawla, K. Singh, A. Myers, D. Michalak, R. Schenker, C. Jezewski, B. Krist, F. Gstrein, T. Indukuri, H. Yoo

Proceedings Volume 9054, 905404 (2014) https://doi.org/10.1117/12.2048599

KEYWORDS: Optical lithography, Dielectrics, Plasma, Metals, Critical dimension metrology, Etching, Copper, Lithography, Chemistry, Process control

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Proceedings Article | 20 April 2006 Paper

3-D integration of nanophotonics with CMOS electronics

Bahram Jalali, Tejaswi Indukuri, Prakash Koonath, Koichiro Kishima

Proceedings Volume 6183, 618314 (2006) https://doi.org/10.1117/12.669074

KEYWORDS: Silicon, Waveguides, Oxygen, Oxides, Resonators, Integrated optics, Transistors, Electronics, Photonic devices, Semiconducting wafers

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Proceedings Article | 3 March 2006 Paper

3D integration of sub-surface photonics with CMOS

Bahram Jalali, Tejaswi Indukuri, Prakash Koonath

Proceedings Volume 6124, 61240U (2006) https://doi.org/10.1117/12.652242

KEYWORDS: Silicon, Waveguides, Resonators, Microresonators, Electronics, Photonics, Integrated optics, Semiconducting wafers, Optical filters, Transistors

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Proceedings Article | 27 August 2005 Paper

Optical continuum generation on a silicon chip

Bahram Jalali, Ozdal Boyraz, Prakash Koonath, Varun Raghunathan, Tejaswi Indukuri, Dimitri Dimitropoulos

Proceedings Volume 5931, 59310Q (2005) https://doi.org/10.1117/12.622619

KEYWORDS: Waveguides, Silicon, Phase shifts, Absorption, Scanning probe microscopy, Raman scattering, Resonators, Kerr effect, Optical filters, Optical amplifiers

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Proceedings Article | 25 March 2005 Paper

Fabrication of vertically coupled silicon nanophotonic circuits via SIMOX 3D sculpting

Bahram Jalali, Prakash Koonath, Tejaswi Indukuri

Proceedings Volume 5729, (2005) https://doi.org/10.1117/12.590863

KEYWORDS: Silicon, Waveguides, Resonators, Oxygen, Oxides, Integrated optics, Ions, Photomasks, Scanning electron microscopy, Nanophotonics

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