Tuomas Vainikka
at Univ of Helsinki
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 21 June 2019 Presentation + Paper
I. Kassamakov, G. Maconi, M. Järvinen, A. Nolvi, T. Vainikka, P. Raatikainen, T. Arstila, T. Ylitalo, I. Ninca, K. Ahlers, E. Hæggström
Proceedings Volume 11056, 110560S (2019) https://doi.org/10.1117/12.2526111
KEYWORDS: Super resolution, Optical spheres, Objectives, Monte Carlo methods, Diffraction, Interferometry, Polymers, Glasses, Semiconducting wafers, 3D modeling

Proceedings Article | 21 June 2019 Presentation + Paper
Proceedings Volume 11056, 110560Q (2019) https://doi.org/10.1117/12.2525489
KEYWORDS: Monte Carlo methods, Super resolution, Finite-difference time-domain method, Optical spheres, Diffraction, Objectives, Device simulation, Microscopes, Light scattering, Near field

Proceedings Article | 7 November 2018 Paper
Miikka Järvinen, Tuomas Vainikka , Tapani Viitala, Carlos Bermudez, Roger Artigas, Anton Nolvi, Pol Martinez, Niklas Sandler, Edward Hæggström, Ivan Kassamakov
Proceedings Volume 10819, 108190D (2018) https://doi.org/10.1117/12.2501258
KEYWORDS: Calibration, Standards development, 3D metrology, Solids, 3D image processing, Neodymium, Time metrology, Mirrors, 3D imaging standards, Metrology

Proceedings Article | 16 October 2017 Paper
Miikka Järvinen, Gianmario Scotti, Tuomas Vainikka, Edward Hæggström, Ivan Kassamakov
Proceedings Volume 10451, 104511Q (2017) https://doi.org/10.1117/12.2280547
KEYWORDS: Photoresist materials, Photomasks, Diffractive optical elements, Multiphoton lithography, Microscopes, MATLAB, Source mask optimization, Modulation, 3D metrology, Semiconducting wafers

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